QUARTZ SUBSTRATES / WAFERS

Features of Synthetic Quartz Glass Substrates include:
– Purity: High purity levels eliminates contamination in the quartz substrates.
– Chemical resistance: Excellent thermal shock resistance and quartz glass is chemically inert to most elements and compounds including virtually all acids.
– Heat resistance: High dimensional stability of the quartz glass over a wide temperature range with extremely low coefficient of thermal expansion.
– Transparency: Quartz glass allow a high transmission over a wide range of wavelengths from UV to IR.
– Fluorescence: No fluorescence over a wide range of wavelengths from UV to IR.
– Dielectric properties: Low dielectric loss even at GHz frequencies.
– Surface: High flatness, high uniformity of thickness and smooth surfaces, attributed to the techniques developed for quartz glass photomask substrates used in LSI manufacturing.

S-GRADE SYNTHETIC QUARTZ (UVFS)

S-Grade Synthetic Quartz Glass Substrates feature Ra<2A surface quality (Double Side Typ.) per semiconductor standard.

A-GRADE SYNTHETIC QUARTZ (UVFS)

A-Grade UV Grade Quartz Substrates feature 10-5 Scratch and Dig (Double Side Typ.)

A-Grade Quartz substrates, Quartz plates, slides, wafers and Quartz windows are widely used for imaging / coating purpose.

B-GRADE SYNTHETIC QUARTZ (UVFS)

B-Grade Quartz Substrate features 20-10 Scratch and Dig (Double Side Typ.). <Lambda/10 @ 632.8nm over 1-inch area on-jig tested.

B-Grade Quartz substrates, Quartz plates, slides, wafers and Quartz windows are used for imaging / coating purpose and material processing.

C-GRADE SYNTHETIC QUARTZ (ROUND)

C-Grade Quartz Substrate features 40-20 Scratch and Dig (Double Side Typ.). <Lambda/10 @ 632.8nm over 1-inch area on-jig tested.

C-Grade Quartz substrates, Quartz plates, slides, wafers and Quartz windows are widely used as protection/viewing windows, lab-use glass platforms.

C-GRADE SYNTHETIC QUARTZ (SQUARE)

C-Grade Quartz Substrate features 40-20 Scratch and Dig (Double Side Typ.). <Lambda/10 @ 632.8nm over 1-inch area on-jig tested.

C-Grade Quartz substrates, Quartz plates, slides, wafers and Quartz windows are widely used as protection/viewing windows, lab-use glass platforms.

D-GRADE SYNTHETIC QUARTZ SUBSTRATES

D-Grade Quartz Substrate features 60-40 Scratch and Dig (Double Side Typ.). <Lambda/4@ 632.8nm over 1-inch area on-jig tested.

D-Grade Quartz substrates, Quartz plates, slides, wafers and Quartz windows are widely used as protection/viewing windows in Industrial settings.

E-GRADE SYNTHETIC QUARTZ SUBSTRATES

E-Grade Fused Quartz Glass Substrates or Windows features 80-50 Scratch and Dig (Double Side Typ.). <Lambda/2@ 632.8nm over 1-inch area on-jig tested.

E-Grade Quartz substrates, Quartz plates, slides, wafers and Quartz windows are widely used for general purposes that requires Quartz mechanical properties.